Photolithography Module

Module Description:

This module, created by the Center for Nanotechnology Education (Nano-Link), introduces students to photolithography, "the process of copying a high-resolution pattern onto multiple substrates." During the module learning activity (Option A) students "replicate key parts of the photolithography process" using chemicals and solvents similar to those used in micro- and nano-fabrication in the electronics industry. For instructors working with younger students or labs without fume hoods, a water-based photolithography learning activity is provided (Option B). 

Module Contents:

This module includes an instructor guide for the chemical and solvent based learning activity (Option A), an instructor guide for the water based learning activity (Option B), and presentation slides. 

The 12-page instructor guides include an abstract, learning outcomes, prerequisites, learning activity description and procedure, discussion questions, and more. The presentation slides provide background information on photolithography for the module learning activity, including the following topics: Microfabrication, Deposition Processes, Layer Modification, Dopant Introduction, Applying the Photoresist to a Substrate, Photochemistry, and more. 

Versions in Spanish are also included for all of the module documents. 

For orientation purposes Photolithography.pdf is included as a separate attachment and offers a sample of the type of material included in this module. 

Below is a list of the files contained within the .zip attachments. The size of each file is included in parenthesis. 

Photolithography (4 files, 4.2 MB)

• Photolithography Background Information (Photolithography Background Material - Nano-Link.pptx 2.8 MB)
• Photolithography Option A (Solvent-based) (Photolithography Option A - Nano-Link.docx 675 KB)
• Photolithography Option B (Water-based) (Photolithography Option B - Nano-Link.docx 676 KB)

Photolithography (Spanish) (8 files, 18.6 MB)

• Fotolitografía (Fotolitografía - Nano-Link.pdf 6.1 MB)
• Fotolitografía  (Fotolitografía - Nano-Link.pptx 4.4 MB)
• Fotolitografía Opcíon A (a base de solvente) (Fotolitografía - Opción A - Nano-Link.docx 721 KB)
• Fotolitografía Opcíon A (a base de solvente) (Fotolitografía - Opción A - Nano-Link.pdf 419 KB)
• Fotolitografía Opcíon A  (a base de solvente) (Fotolitografía - Opción B - Nano-Link.docx 338 KB)
• Fotolitografía Opcíon B (a base de agua) (Fotolitografía - Opción B - Nano-Link.pdf 431 KB)
• Fotolitografía (Presentación - Fotolitografía - Nano-Link.pdf 6.1 MB)