Introduction to Vacuum Technology e-book, student laboratory manual and instructor's guide can be accessed from Milne Open Textbooks OER site.
Available Formats:
Instructors can request access to the password protected resources by e-mailing ost@geneseo.edu.
Desorption animation developed by student artist Gigi Bocek (Chapter 2).
Piston pump example animation (Chapter 4).
Roots pump animation developed by student artist Gigi Bocek (Chapter 4).
Rotary vane pump animation provided by Busch Vacuum Solutions (Chapter 4).
TABLE OF CONTENT
CHAPTER 1
Learning Objectives
A Brief Vignette
1.1 Introduction
1.2 What is “Vacuum”?
1.3 Vacuum as an “Enabler”
1.3.1 Food Preservation
1.3.2 Thermal Insulation
1.3.3 Vacuum Gripping
1.3.4 Thin Film Deposition by Metal Evaporation
1.3.5 Other Examples
1.4 Benefits of Creating a "Vacuum"
1.5 How to Create a “Vacuum”
1.6 Sources for Information on Vacuum Technology
1.6.1 Professional Societies
1.6.2 Publications
1.6.3 Vacuum Equipment Manufacturers
1.7 Looking Ahead
Summary
References
Questions and Problems
CHAPTER 2
Learning Objectives
2.1 Introduction
2.2 States of Matter
2.3 Kinetic Theory of Gases
2.3.1 Distribution of Gas Molecules in an Enclosed Volume
2.3.2 Compressibility of Gases
2.3.3 Effects of Temperature
2.3.4 Gases of Equal Volume and Pressure
2.3.5 Mixture of Gases
2.4 Ideal Gas Law
2.5 Gas Pressure
2.6 Mean Free Path
2.7 Adsorption and Desorption
2.8 Diffusion and Permeation
2.9 Thermal Conductivity
2.10 Vapor Pressure
Summary
References
Questions and Problems
CHAPTER 3
Learning Objectives
3.1 Introduction
3.2 Gas Loads
3.3 Throughput, Pumping Speed and Conductance
3.4 Vacuum Systems – An Overview
3.4.1 Vacuum Chamber
3.4.2 Vacuum Pumps
3.4.3 Vacuum Gauges
3.4.4 Vacuum System Components
3.5 Schematic Symbols and Diagrams
3.6 A Simple Rough Vacuum System
3.7 Characterizing Vacuum Systems
Summary
References
Questions and Problems
Chapter 3 Quiz
CHAPTER 4
Learning Objectives
4.1 Introduction
4.2 Overview of a Rough Vacuum System
4.3 Gas Load in the Rough Vacuum Regime
4.4 Rough Vacuum Pumps
4.4.1 Diaphragm Pumps
4.4.2 Scroll Pumps
4.4.3 Rotary Vane Pumps
4.4.4 Roots Vacuum Pumps
4.4.5 Other Rough Vacuum Pumps
4.5 Rough Vacuum Gauges
4.5.1 Bourdon Gauges
4.5.2 Capacitance Diaphragm Gauges
4.5.3 Thermal Conductivity Gauges
4.5.3.1 Thermocouple Gauges
4.5.3.2 Pirani Gauges
4.5.3.3 Thermal Conductivity Gauges and Gas Species Dependencies
4.5.4 Other Rough Vacuum Gauges
4.6 Piping, Valves and Fittings
4.7 Rough Vacuum Pump-Down Process
4.8 Conductance
4.9 Troubleshooting Rough Vacuum Systems
Summary
References
Questions and Problems
TABLE OF CONTENT
Rough Vacuum Equipment Training System
Learning Activity 1.1: Marshmallow Preparation - Measurements and Calculations
Learning Activities 2.1-2.4: Marshmallow Measurements, Pressure Calculations, Components of the Rough Vacuum Trainer System, and Gas Flow Paths
Learning Activities 3.1-3.4: Unit Conversions, Scientific Notation, Absolute and Gage Pressure, and Pressure Measurement
Learning Activities 4.1-4.4: Gas Laws Activities
Learning Activities 5.1-5.3: Equilibrium Vapor Pressure of Water
Learning Activities 6.1-6.2: Building and Pumping Down a Rough Vacuum System
Learning Activities 7.1-7.3: Vacuum Pump-Down Curves and Vacuum Pump-Down Time
Learning Activities 8.1-8.5: Rough Vacuum System Pump-Down Time
Learning Activities 9.1-9.2: Pressure Rate-of-Rise Curves
Learning Activities 10.1-10.4: Thin Film Deposition Using Rough Vacuum Equipment Trainer
This work was made possible with a grant from the National Science Foundation DUE #2000454. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
