Thin Film Deposition of Aluminum with Affordable Rough Vacuum Thermal Evaporator

This presentation, published by Erie Community College, was presented at the 2023 High Impact Technology Conference and focuses on building a curriculum to train technicians proficient in vacuum technology for the semiconductor industry. After discussing the curriculum, the presentation uses images to provide an overview of the components and function of the Rough Vacuum System Equipment Trainer (RVET), an affordable vacuum system model intended for classroom use. Additionally, the use of aluminum thin film in the RVET is discussed.

The PowerPoint is split into the following sections:

1. Projects Background and Motivation
2. Rough Vacuum Equipment Trainer (RVET)
3. Adding Thin Film Evaporation Functionality to RVET
4. Demonstration of Aluminum Thin Film Deposition
5. Room for Improvement
6. Data and Data Analysis
7. Laboratory Experiments
8. Conclusion

Material from the curriculum discussed in the presentation, such as the E-book, laboratory manuals, learning activities, and videos, are available to view separately.