SCME Webinar: Microsystems Processes Part II: Photolithography and Etch

These presentation slides, made available by the Support Center for Microsystems Education, provide instructional information on etch processes for microsystems and photolithography. Topics include the role of photolithography and etch within microsystems fabrication, the photolithography process, types of Etch processes, wet vs. dry etch, and chemical vs. physical etch. Included with the slides is a handout that lists questions that the presentation addresses, links and references in the presentation, contact information for the presenters, and information about other SCME webinars.